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High-performance pressure sensor overcomes the "stuck neck" technology instrument industry

       At present, my country's science and technology undertakings have achieved historical, holistic, and structural changes. Major innovations are emerging, and some frontier directions have begun to enter the parallel and leading stage. However, it should also be noted that there are still some urgent problems in the field of science and technology in our country. The situation where key core technologies are controlled by people has not been fundamentally changed, and there is an urgent need to concentrate our efforts on tackling the problems.

   Pressure sensor is a kind of sensor commonly used in industrial practice. Generally, the output of ordinary pressure sensor is analog signal. Analog signal refers to the continuous signal of information parameter within a given range. We want to accelerate the formation of a one-stop industrial development model from sensor research and development to mass production, and take a leap-forward development path that combines independent innovation and international cooperation to make my country a major producer of sensors in the world. Overcoming the "stuck neck" technique is more important.

       Recently, Central South University and the 48th Research Institute of China Electronics Technology Group Corporation jointly undertook the development and application of a major special aero-engine high-performance pressure sensor in Changsha City, which passed the acceptance test, which means that this "stuck neck" key technology Be able to conquer.

   The project was established in 2018, relying on the Forty-eight CLP and Central South University to focus on the research and development of high-performance pressure sensors, breaking the blockade of foreign companies. After three years of scientific and technological research, the project team has overcome key processes and technologies such as precision doping of sensitive resistors, SOI pressure-sensitive chip manufacturing, and leadless pressure sensor packaging.

       The high-performance SOI pressure sensor device developed by it has been validated on a certain type of aero engine, and its performance has reached the international advanced level, breaking the blockade of foreign high-end pressure sensors, and solving the technical problem of "stuck neck" of high temperature pressure sensors , Lay an important theoretical and technical foundation for the development of higher temperature pressure sensors.

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